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Ceramics Products

TaC Coated Graphite Heater

For High Temperature Thin Film Deposition Equipment

Momentive Quartz Technologies Inc offers high temperature resistive or inductive heaters with a proprietary coating known as Tantalum Carbide (TaC). With its high temperature stability and high chemical resistance, TaC coated graphite heater provides a more robust heating solution that enhances the life of heaters in harsh environment, reduces equipment maintenance cycle/cost, and increase production yield.

Key Features

  • Temperature stability > 2200 C
  • Ultra high purity
  • Hard coat with low particle release
  • Resistance to H2, NH3, SiH4, CH4
  • Resistance to thermal stock
  • Stable hot electrical resistance
  • Robust electrical contact
  • Conformal coating coverage
  • Strong adhesive to graphite
  • Simple 1D to complex 3D shapes

Potential Applications

  • Resistive heating coil
  • CVD hot filament
  • Inductive heating plate
  • Inductive heating cylinder

TaC Coating with High Crystallinity and Excellent Uniformity

TaC-Coating-with-High-Crystallinity-and-Excellent-Uniformity 10?m
10?m
TaC-Coating-with-High-Crystallinity-and-Excellent-Uniformity 300?m
300?m

IR and Optical Image of TaC Heater at 1100C

TaC Hot Filament Thermal Cycled to 2000C at Rate 1000C/min

Typical Property Comparison of TaC and SiC Coatings

Density (gm/cm3) Emissivity(1) CTE (x10-6/K) Hardness (HK) Resistance (Ohm-cm) Thermal Stability Etch Rate(2) in NH3 (̳/) Etch Rate(3) in H2 (̳/) Thickness Variation
TaC
14.3
0.3
6.3
2000
1x10-5
>2200 C
0.2
0.1
~5%
SiC
3.2
0.8
4.5
2800
2x10-3
<1600 C
1.5
1.7
~10%

Note: Test data. Actual results may vary.
Typical properties are average data and are not to be used as or to develop specifications.
(1) Emissivity is measured at 950nm and 1000 C.
(2) Etch rate in NH3 is measured at 1400 C and 500 Torr.
(3) Etch rate in H2 is measured at 1400 C and 760 Torr.

Download the product datasheet

TaC Heaters

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TaC Heaters

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No. 6, 10th Floor, No. 65, Gaotie 7th Road, Zhubei City, Hsinchu, Taiwan

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No. 1088 Yuanshen road, Suite 1101 Pingan Fortune Building, Shanghai 200122, China

+86 21 5848 1388

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7F of WONIK Building, 20, Pangyo-ro 255beon-gil, Bundang-gu, Seongnam-si, Gyeonggi-do,
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+82 31 8038 9069

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Park West 10th floor, 6-12-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo 1600023,
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+81 3 6721 1910