For High Temperature Thin Film Deposition Equipment
Momentive Quartz Technologies Inc offers high temperature resistive or inductive heaters with a proprietary coating known as Tantalum Carbide (TaC). With its high temperature stability and high chemical resistance, TaC coated graphite heater provides a more robust heating solution that enhances the life of heaters in harsh environment, reduces equipment maintenance cycle/cost, and increase production yield.
Key Features
Temperature stability > 2200 °C
Ultra high purity
Hard coat with low particle release
Resistance to H2, NH3, SiH4, CH4
Resistance to thermal stock
Stable hot electrical resistance
Robust electrical contact
Conformal coating coverage
Strong adhesive to graphite
Simple 1D to complex 3D shapes
Potential Applications
Resistive heating coil
CVD hot filament
Inductive heating plate
Inductive heating cylinder
TaC Coating with High Crystallinity and Excellent Uniformity
10?m
300?m
IR and Optical Image of TaC Heater at 1100°C
TaC Hot Filament Thermal Cycled to 2000°C at Rate 1000°C/min
